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DOE OSTI · 2002010

Deterministic creation of optically active defect in AlN toward integrated single photon emitters.

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Byeon, Heejun, Titze, Michael, Campbell, DeAnna, Schultz, Peter, Wang, George, Bielejec, Edward, Lilly, Michael, Mounce, Andrew. 2022-03-01. Deterministic creation of optically active defect in AlN toward integrated single photon emitters.. https://doi.org/10.2172/2002010

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