DOE OSTI · 2006067
Direct Integration of Atomic Precision Devices into a MOS-Compatible Process.
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Ivie, Jeffrey, Campbell, DeAnna, Leenheer, Andrew, Halsey, Connor, Anderson, Evan, Schmucker, Scott, Scrymgeour, David, Gao, Xujiao, Lepkowski, William, Lu, Tzu-Ming, Tracy, Lisa, Misra, Shashank. 2022-10-01. Direct Integration of Atomic Precision Devices into a MOS-Compatible Process.. https://doi.org/10.2172/2006067
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