Generating electron cyclotron resonance plasma using distributed scheme

Abstract

This study employs a distributed microwave input system and permanent magnets to generate large-area electron cyclotron resonance (ECR) plasma. ECR plasmas were generated with nitrogen gas, and the plasma density was measured by Langmuir probe. A uniform ECR plasma with the electron density fluctuation of {+-}9.8% over 500 mm Multiplication-Sign 500 mm was reported. The proposed idea of generating uniform ECR plasma can be scaled to a much larger area by using n Multiplication-Sign n microwave input array system together with well-designed permanent magnets.