DOE OSTI · 2431777
Understanding Silicon Nitride Crystallization from Amorphous Deposited Layers with Molecular Dynamics
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Lane, James Matthew Doyle, Grutzik, Scott Joseph, Hattar, Khalid, Lim, Hojun, Podlevsky, Jennie, Bishop, Christopher, Janicki, Tesia Danielle. 2023-03-01. Understanding Silicon Nitride Crystallization from Amorphous Deposited Layers with Molecular Dynamics. https://doi.org/10.2172/2431777
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