DOE OSTI · 2586375
Pathfinding Process Development for the Realization of Atomic Precision Advanced Manufacturing (APAM)-Based Vertical Tunneling Field Effect Transistors for Enhanced Energy Efficiency
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Anderson, Evan Michael, Allemang, Christopher Richard, Arose, Christopher Dylan Jon, Lu, Tzu-Ming, Schmucker, Scott William, Sheridan, Thomas Robert, Ivie, Jeffrey Andrew, Campbell, DeAnna Marie, Vigil, Ashlyn Pamela Rose, Hawkins, Alisha, Gamache, Phillip, Gao, Xujiao, Weingartner, Thomas Alan, Misra, Shashank. 2024-05-01. Pathfinding Process Development for the Realization of Atomic Precision Advanced Manufacturing (APAM)-Based Vertical Tunneling Field Effect Transistors for Enhanced Energy Efficiency. https://doi.org/10.2172/2586375
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