SEARCH · Search NASA
Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.
Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.
The advancement of the MEMS micro-gyroscope development effort at the Jet Propulsion Laboratory has necessitated the production of autonomous test equipment.
This paper reports on JPL's on-going research into MEMS gyroscopes. This paper will describe the gyroscope's fabrication-methods, a new 8-electrode layout developed to improve performance, and performance statistics of a batch of six gyroscopes recently rate tested.
A micro-gyroscope (10) having closed loop operation by a control voltage (V.sub.TY), that is demodulated by an output signal of the sense electrodes (S1, S2), providing Coriolis torque rebalance to prevent displacement of the micro-gyroscope (10) on the output axis (y-axis). The present invention provides wide-band, closed-loop operation for a micro-gyroscope (10) and allows the drive frequency to be closely tuned to a high Q sense axis resonance. A differential sense signal (S1-S2) is compensated and fed back by differentially changing the voltage on the drive electrodes to rebalance Coriolis torque. The feedback signal is demodulated in phase with the drive axis signal (K.sub..omega..crclbar..sub.x) to produce a measure of the Coriolis force.
A micro-gyroscope (10) having closed loop output operation by a control voltage (V.sub.ty), that is demodulated by a drive axis (x-axis) signal V.sub.thx of the sense electrodes (S1, S2), providing Coriolis torque rebalance to prevent displacement of the micro-gyroscope (10) on the output axis (y-axis) V.sub.thy.about.0. Closed loop drive axis torque, V.sub.tx maintains a constant drive axis amplitude signal, V.sub.thx. The present invention provides independent alignment and tuning of the micro-gyroscope by using separate electrodes and electrostatic bias voltages to adjust alignment and tuning. A quadrature amplitude signal, or cross-axis transfer function peak amplitude is used to detect misalignment that is corrected to zero by an electrostatic bias voltage adjustment. The cross-axis transfer function is either V.sub.thy/V.sub.ty or V.sub.tnx/V.sub.tx. A quadrature signal noise level, or difference in natural frequencies estimated from measurements of the transfer functions is used to detect residual mistuning, that is corrected to zero by a second electrostatic bias voltage adjustment.
The goal of this work is development of fully electrostatically suspended and rebalancing angular rate sensing micro-gyroscope fabricated according to standard VLSI techniques. Fabrication of test structures is proceeding. Off chip electronics for the electrostatic sensing and driving circuits has been tested. The prototype device will be assembled in a hybrid construction including the FET input stages of the sensors.
This slide presentation reviews the use of micro and nano systems in Space exploration. Included are: an explanation of the rationales behind nano and micro technologies for space exploration, a review of how the devices are fabricated, including details on lithography with more information on Electron Beam (E-Beam) lithography, and X-ray lithography, a review of micro gyroscopes and inchworm Microactuator as examples of the use of MicroElectoMechanical (MEMS) technology. Also included is information on Carbon Nanotubes, including a review of the CVD growth process. These micro-nano systems have given rise to the next generation of miniature X-ray Diffraction, X-ray Fluorescence instruments, mass spectrometers, and terahertz frequency vacuum tube oscillators and amplifiers, scanning electron microscopes and energy dispersive x-ray spectroscope. The nanotechnology has also given rise to coating technology, such as silicon nanotip anti-reflection coating.
Micro-electro-mechanical systems (MEMS) provide an emerging technology that has the potential for revolutionizing the way space systems are designed, assembled, and tested. The high launch costs of current space systems are a major determining factor in the amount of functionality that can be integrated in a typical space system. MEMS devices have the ability to increase the functionality of selected satellite subsystems while simultaneously decreasing spacecraft weight. The Air Force Phillips Laboratory (PL) is supporting the development of a variety of MEMS related technologies as one of several methods to reduce the weight of space systems and increase their performance. MEMS research is a natural extension of PL research objectives in micro-electronics and advanced packaging. Examples of applications that are under research include on-chip micro-coolers, micro-gyroscopes, vibration sensors, and three-dimensional packaging technologies to integrate electronics with MEMS devices. The first on-orbit space flight demonstration of these and other technologies is scheduled for next year.
Explore the source record for details and available documents.
SatCon Technology has performed a study of micromechanical gyroscopes. The goals of this program were to define a baseline system configuration and establish technical feasibility for proof of principle and prototype fabrication. This report documents the research and presents the baseline mechanical design, sensors, control systems, and electronics. This section presents a project overview and specific technical objectives. Section 2 contains a background on micromechanical technology. Section 3 contains the microgyroscope specifications and configurations. Section 4 contains the electromechanical design. Section 5 outlines the control and electronics. Section 6 presents a preliminary sequence for microfabrication of the baseline design, and Section 7 contains conclusions and recommendations for further work.
Explore the source record for details and available documents.
Explore the source record for details and available documents.
This paper reports on the development of a silicon bulk micromachined vibratory gyroscope designed for a micro inertial reference system for microspacecraft applications.
We propose a tuning method for Micro-Electro-Mechanical Systems (MEMS) gyroscopes based on evolutionary computation that has the capacity to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. We present the results of an experiment to determine the speed and efficiency of an evolutionary algorithm applied to electrostatic tuning of MEMS micro gyros. The MEMS gyro used in this experiment is a pyrex post resonator gyro (PRG) in a closed-loop control system. A measure of the quality of tuning is given by the difference in resonant frequencies, or frequency split, for the two orthogonal rocking axes. The current implementation of the closed-loop platform is able to measure and attain a relative stability in the sub-millihertz range, leading to a reduction of the frequency split to less than 100 mHz.
A split-resonator integrated-post vibratory microgyroscope may be fabricated using micro electrical mechanical systems (MEMS) fabrication techniques. The microgyroscope may include two gyroscope sections bonded together, each gyroscope section including resonator petals, electrodes, and an integrated half post. The half posts are aligned and bonded to act as a single post.
Three different rebalance electronic loops were designed, implemented, and evaluated. The loops were width-modulated binary types using a 614.4 kHz keying signal; they were developed to accommodate the following three inertial sensors with the indicated resolution values: (1) Kearfott 2412 accelerometer - resolution = 260 micro-g/data pulse, (2) Honeywell GG334 gyroscope - resolution = 3.9 milli-arc-sec/data pulse, (3) Kearfott 2401-009 accelerometer - resolution = 144 milli-g/data pulse. Design theory, details of the design implementation, and experimental results for each loop are presented.
We report on the development of a hardware platform for integrated tuning and closed-loop operation of MEMS gyroscopes. The platform was developed and tested for the second generation JPL/Boeing Post-Resonator MEMS gyroscope. The control of this device is implemented through a digital design on a Field Programmable Gate Array (FPGA). A software interface allows the user to configure, calibrate, and tune the bias voltages on the micro-gyro. The interface easily transitions to an embedded solution that allows for the miniaturization of the system to a single chip.
The concept of testing Einstein's general theory of relativity by means of orbiting gyroscopes was first proposed in 1959, which lead to the development of the Gravity Probe B experiment. Einstein's theory concerns the predictions of the relativistic precession of a gyroscope in orbit around earth. According to his theory, there will be two precessions due to the warping of space-time by the earth's gravitational field: the geodetic precession in the plane of the orbit, and the frame-dragging effect, in the direction of earth rotation. For a polar orbit, these components are orthogonal. In order to simplify the measurement of the precessions, Gravity Probe B (GP-B) will be placed in a circular polar orbit at 650 km, for which the predicted precessions will be 6.6 arcsec/year (geodetic) and 42 milli-arcsec/year (frame-dragging). As the gyroscope precesses, the orientation of its spin-axis will be measured with respect to the line-of-sight to Rigel, a star whose proper motion is known to be within the required accuracy. The line-of-sight to Rigel will be established using a telescope, and the orientation of the gyroscope spin axis will be measured using very sensitive SQUID (Superconducting Quantum Interference Device) magnetometers. The four gyroscopes will be coated with niobium. Below 2K, the niobium becomes superconducting and a dipole field will be generated which is precisely aligned with the gyroscope spin-axis. The change in orientation of these fields, as well as the spin-axis, is sensed by the SQUID magnetometers. In order to attain the superconducting temperatures for the gyroscopes and the SQUID's, the experiment package will be housed in a dewar filled with liquid helium. The helium flow through a GP-B micro thruster and into a vacuum is investigated using the Direct Simulation Monte Carlo method.
Miniature high-performance low-mass space avionics systems are desired for planned future outer planetary exploration missions (i.e. Europa Orbiter/Lander, Pluto-Kuiper Express). The spacecraft fuel and mass requirements enabling orbit insertion is the driving requirement. The Micro Navigator is an integrated autonomous Guidance, Navigation & Control (GN&C)micro-system that would provide the critical avionics function for navigation, pointing, and precision landing. The Micro Navigator hardware and software allow fusion of data from multiple sensors to provide a single integrated vehicle state vector necessary for six degrees of freedom GN&C. The benefits of this MicroNavigator include: 1) The Micro Navigator employs MEMS devices that promise orders of magnitude reductions in mass power and volume of inertial sensors (accelerometers and gyroscopes), celestial sensing devices (startracker, sun sensor), and computing element; 2) The highly integrated nature of the unit will reduce the cost of flight missions. a) The advanced miniaturization technologies employed by the Micro Navigator lend themselves to mass production, and therefore will reduce production cost of spacecraft. b) The integral approach simplifies interface issues associated with discrete components and reduces cost associated with integration and test of multiple components; and 3) The integration of sensors and processing elements into a single unit will allow the Micro Navigator to encapsulate attitude information and determination functions into a single object. This is particularly beneficial for object-oriented software architectures that are used in advanced spacecraft. Additional information is contained in the original extended abstract.