DOE OSTI · 2430401
Atomistic mechanisms of silicon nitride crystallization elucidated by molecular dynamics
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Janicki, Tesia Danielle, Chacon, Carlos Manuel, Chiu, Edwin, Gibson, Jason, Grutzik, Scott Joseph, Hattar, Khalid, Hennig, Richard, Parkin, Calvin, Podlevsky, Jennie, Rezwan, Aashique Alam, Bishop, Christopher, Lane, James Matthew Doyle. 2023-08-01. Atomistic mechanisms of silicon nitride crystallization elucidated by molecular dynamics. https://doi.org/10.2172/2430401
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